Method of manufacturing electrode foil for aluminum electrolytic capacitor and AC power supply unit

ABSTRACT

A method of manufacturing electrode foil for aluminum electrolytic capacitors and an AC power supply unit used therewith. An etching is performed on an aluminum foil immersed in a electrolytic solution by applying an AC current to a pair of electrodes in the electrolytic solution. A waveform of the AC current is a deformed sine wave including a period of time (a) when an electric current rises from zero to a peak value, and another period of time (b) when the electric current falls from the peak value to zero. With the periods of time (a) and (b) made different from each other, the surface area of the aluminum foil is expanded by the etching efficiently and an enhancement of electric capacity of the electrode foil is obtained.

FIELD OF THE INVENTION

[0001] The present invention relates to a method of manufacturing electrode foil for aluminum electrolytic capacitors and an alternative current (AC) power supply unit used in the manufacturing method. More particularly, the present invention relates to a method of manufacturing and AC power supply unit involving the technologies most suitably used in an etching of an anode foil for low voltage aluminum electrolytic capacitors.

BACKGROUND OF THE INVENTION

[0002] In recent years as the equipment, in which aluminum electrolytic capacitors are used, is reduced in size and enhanced in reliability, requirements from users of aluminum electrolytic capacitors for a reduction in size as well as a reduction in cost of the capacitors are rapidly increasing. As a result, much more increased electric capacity per unit area than before has been required of electrode foil used in aluminum electrolytic capacitors.

[0003] Among the aforementioned electrode foil, the anode electrode foil for low voltage aluminum electrolytic capacitors is produced in a following manner. At first, electrochemical or chemical etching surface treatments is applied to aluminum foil to expand the surface area thereof. Then, the aluminum foil is washed to form a hydrate film on the surface thereof followed by a drying of the foil to finish the etched foil. Afterwards, an anodizing treatment is applied to the etched foil to perform anode oxidation, thus finishing the production of the anode foil.

[0004] By the etching surface treatments applied to aluminum foil as described above, an great number of etched pits are formed step by step inside the aluminum foil as the step of performing the etching process is repeated. The etching processes are performed in a electrolytic solution mainly comprised of hydrochloric acid while alternating currents being applied.

[0005] In general, the mechanism of an alternating current etching process is known as follows. A hydrate film on the surface of aluminum is formed when a cathode current flows on its surface and pits are formed at the places where the hydrate film has defects at the time when an anode current flows. By repeating this reaction with alternating currents being applied, etch pits are formed in aluminum foil. By devising or improving the composition of electrolyte and the etching conditions such as a current density and frequencies of alternating currents, etched foil characteristics such as electric capacity, mechanical strength and the like have been enhanced.

[0006] In the step of performing the etching process, in which alternating currents are applied to aluminum foil in a electrolytic solution that is mainly comprised of hydrochloric acid, a sine wave is used as the waveform of the alternating currents as FIG. 10 shows and an increase of the surface area of aluminum foil is obtained by adjusting the frequencies of the sine wave. However, an excessive increase of the surface area of aluminum foil results in a reduction of mechanical strength of aluminum foil, thus presenting a problem that there is a limit to an increase in the surface area of aluminum foil.

[0007] Although an etching process employing a rectangular wave, a triangular wave and the like as the waveform of alternating currents have been tried, it became rather difficult to further increase the surface area of aluminum foil. In addition, as is shown in the Japanese Patent Laid-Open Unexamined Publications S51-25439, S61-158133, 12-66925, H2-211614, H10-163073 and the like, a variety of electric current waveforms are proposed for use in the alternating current etching process. However, even with those improved technologies, it is hard to satisfy the requirements for electrode foil for aluminum electrolytic capacitors requested in recent years.

[0008] The present invention addresses the problems as described above and aims to provide a method of manufacturing electrode foil for aluminum electrolytic capacitors and an alternating current power supply unit used therein. They allow the electric capacity of electrode foil to be enhanced via an increase of the surface area of aluminum foil by forming closely formed, high-density etch pits in consideration of such factors as a chemical dissolving reaction, an electrochemical reaction and a diffusion phenomenon involving the aluminum foil.

SUMMARY OF THE INVENTION

[0009] A method of manufacturing electrode foil for aluminum electrolytic capacitors of the present invention is characterized by applying alternating currents to a pair of electrode plates in a electrolytic solution in etching processing of aluminum foil. The method employs as the waveforms of alternating currents between the anode and cathode a deformed sine wave that has a different period of time between the portion where the current rises from zero to a peak value and the portion where the current falls from the peak value to zero. More specifically, during the period of time when the current rises from zero to the peak value, uniform and closely formed etch pits are produced and then, during the next period of time when the current falls from the peak value to zero, etch pits are grown to have a high density, thereby expanding the surface area of aluminum foil efficiently. As a result, the electric capacity of electrode foil for aluminum electrolytic capacitors is increased.

[0010] In other words, by applying a great amount of electricity to aluminum foil in such a short period of time when the electric current rises from zero to the peak value, uniform and closely formed etch pits are produced, and then during the next period of time when the electric current falls from the peak value to zero, the etch pits are grown to have a high density while the etch pits being produced, thereby allowing the surface area of aluminum foil to be expanded efficiently.

[0011] In addition, when the peak value of the deformed sine wave current is made the same as the peak value of a conventional sine wave current, a root-mean-square (rms) value and a mean value of the electric current are made the same with each other. This allows the production conditions involving the alternating currents to be easily set in comparison with the case where a rectangular waveform or a triangular waveform is used and consequently allows the electric capacity per unit amount of electricity to be increased.

[0012] A hydrate of aluminum is produced on the cathode of alternating currents and etch pits are formed on the anode from defects of the hydrate of aluminum. And the etch pits are uniformly distributed in location without depending on the conditions of the defects of the hydrate, since the current density during the initial period of time when the current rises becomes particularly high. The observing of the current waveform in the anode shows the fact.

[0013] In addition, it is preferred that the waveforms of the deformed sine wave applied to the anode and cathode are made symmetrical.

[0014] When the period of time when the current falls exceeds 120 where the period of time when the current rises is taken as 1 (i.e., the period of time when the current rises becomes shorter than another period of time), the reaction during the current rising period becomes too abrupt, thereby producing excessively fine etch pits. These excessively fine etch pits increase the apparent surface area of aluminum foil but at the same time simply increase electrical resistance inside the respective etch pits, thereby prohibiting the electric capacity to be utilized effectively. Therefore, an average etch pit diameter ranging from 0.15 μm to 2.8 μm is appropriate.

[0015] Whenever the period of time when the current falls is less than 1.05, etch pits are not allowed to be uniformly distributed in location, thereby preventing the surface area of aluminum foil from being expanded.

BRIEF DESCRIPTION OF THE DRAWINGS

[0016]FIG. 1 is a cross-sectional view of an etching vessel used in a manufacturing method of electrode foil for aluminum electrolytic capacitors of the present invention.

[0017]FIG. 2 is a waveform diagram to show a deformed sine wave of alternating currents used in a first, third through fifth embodiments of the present invention.

[0018]FIG. 3 is a block diagram of an alternating current power supply unit used in the embodiments of the present invention.

[0019]FIG. 4 is a waveform diagram to show a deformed sine wave of alternating currents used in Example 1 of a second embodiment of the present invention.

[0020]FIG. 5 is a waveform diagram to show a deformed sine wave of alternating currents used in Example 2 of the second embodiment of the present invention.

[0021]FIG. 6 is a waveform diagram to show a deformed sine wave of alternating currents used in Example 3 of the second embodiment of the present invention.

[0022]FIG. 7 is a waveform diagram to show a deformed sine wave of alternating currents used in Example 4 of the second embodiment of the present invention.

[0023]FIG. 8 is a waveform diagram to show a deformed sine wave of alternating currents used in Example 5 of the second embodiment of the present invention.

[0024]FIG. 9 is a block diagram to show block diagram of a feedback unit used in sixth embodiment of the present invention.

[0025]FIG. 10 is a waveform diagram of a sine wave of alternating currents used in a conventional manufacturing method of electrode foil for aluminum electrolytic capacitors and in comparative examples 1 to 5.

DESCRIPTION OF THE PREFERED EMBODIMENTS

[0026] First Embodiment

[0027] A description is given to a method of manufacturing electrode foil for aluminum electrolytic capacitors in a first embodiment of the present invention.

[0028] First, aluminum foil of 100 μm in thickness and 99.98% in purity is immersed in a 90° C. aqueous solution containing 1.0 weight (wt) % of phosphoric acid for 60 seconds as pretreatment.

[0029] Next, a description is given to an etching process with reference to FIG. 1. As FIG. 1 shows, a pair of electrodes 3 and aluminum foil 2 are immersed in etching vessel 4 filled with 30° C. electrolytic solution 5 containing 5 wt % of hydrochloric acid, 2 wt % of aluminum chloride, 0.1 wt % of sulfuric acid, 0.5 wt % of phosphoric acid and 0.2 wt % of nitric acid (aluminum ion concentration in electrolytic solution 5 is adjusted to 0.1 wt %).

[0030] An etching process is performed by applying an alternating current (hereafter AC) with a deformed sine wave to the pair of electrodes 3 from AC power supply unit 1 for 300 seconds.

[0031] At this time, AC power supply unit 1 is adjusted to a current density of 0.5 A/cm² and a frequency of 40 Hz and the waveform of the deformed sine wave has different waveforms between the period of time (a) when the electric current rises from zero to a peak value, and the period of time (b) when the electric current falls from the peak value to zero, as FIG. 2 shows. The etching process is performed by setting the period of time (b) where the electric current falls from the peak value to zero as 1.02, 1.05, 1.1, 1.5, 2.0, 10, 30, 50, 70, 90, 110, 120 and 130, respectively, while the period of time (a) where the electric current rises from zero to the peak value being defined as 1.

[0032] A desired condition for etching process is input in advance to AC power supply unit 1 via etching condition input unit 11 shown in FIG. 3. The etching condition input to AC power supply unit 1 is converted to an electric signal in etching condition setting unit 12, which is then send to function generator 13 of power supply 16, where a function of a deformed sine wave is calculated based on frequencies and currents. Actual output current obtained by the calculation is amplified in amplifier 14 and applied to the pair of electrodes 3 via output unit 15.

[0033] Finally, aluminum foil 2 is immersed in a at 60° C. aqueous solution containing 10 wt % of sulfuric acid for 100 seconds and then heat treated for 120 seconds at 250° C., thereby producing etched foil that serves as electrode foil for aluminum electrolytic capacitors.

COMPARATIVE EXAMPLE 1

[0034] Etched foil is prepared in the same way as in the first embodiment described above except for performing an etching process by the use of an AC power supply unit with AC currents having the waveform of a sine wave (the ratio between the period of time when the electric current rises from zero to the peak value and the period of time when the electric current falls from the peak value to zero is 1:1) shown in FIG. 10.

[0035] Evaluation results of characteristics of the etched foil prepared in the first embodiment and comparative example 1 are shown in Table 1. The evaluation of the foregoing etched foil is conducted in accordance with the Standards of Electronic Industries Association of Japan (EIAJ: RC-2364A) and the values of electric capacity are based on the electric capacity of comparative example 1 taken as 100.

[0036] As is clearly seen in Table 1, when a period of time (a) when the current rises in the deformed sine wave is taken as 1, the surface area of aluminum foil 2 is expanded efficiently by keeping a period of time (b) when the current falls in a range from 1.05 to 120 in the waveform in FIG. 2. And the electric capacity of the etched foil can be increased.

[0037] On the other hand, when a period of time (a) is taken as 1, and a period of time (b) is less than 1.05, the electric capacity obtained by the etched aluminum foil 2 is almost equal to the electric capacity of the comparative example 1. TABLE 1 EIAJ (RC-2364A) test results Time ratio of film automatic deformed sine wave withstand bending rise fall relative voltage test time (a) time (b) capacitance (Vt) (times) first 1.0 1.02 101 22.9 125 embodiment 1.0 1.05 103 23.5 124 1.0 1.10 105 23.7 126 1.0 1.50 106 23.6 123 1.0 2.0 107 23.4 121 1.0 10.0 109 23.5 124 1.0 30.0 111 23.6 123 1.0 50.0 112 23.8 125 1.0 70.0 113 23.5 124 1.0 90.0 114 23.6 122 1.0 110 116 23.7 123 1.0 120 117 23.5 125 1.0 130 102 22.8 121 comparative 1.0 1.0 100 22.6 114 example 1

[0038] As is described above, the use of a deformed sine wave increases a uniform etch pit density during the current rising period and also prevents useless aluminum dissolving during the current falling period. This enables the etch pits to grow without waste and increases the electric capacity of the etched foil.

[0039] In addition, the waveform of the (a) portion of the deformed sine wave in FIG. 2 corresponds to the current rising portion (1/4 period) of a sine wave having a frequency of 1/(4×a). And the waveform of the (b) portion of the deformed sine wave corresponding to a current falling portion (1/4 period) of a sine wave having a frequency corresponding to 1/(4×b). Therefore, a frequency of the deformed sine wave in FIG. 2 becomes 1/(2×(a+b)).

[0040] It means, the waveform of the deformed sine wave can be regarded as a normal sine wave having the same frequency and the same peak current value with the position of the peak current value of the normal sine wave shifted a little. Therefore, the root-mean-square of current of the deformed sine wave equals to the root-mean-square of current of the sine wave and the mean value of current of the deformed sine wave becomes equal to the mean value of current of the sine wave.

[0041] Consequently, an etching process employing a deformed sine waveform can be performed with the same root-mean-square value and peak value of current as used in performing an etching process employing a normal sine waveform, thereby allowing the production conditions of the etching process to be set easily.

[0042] Second Embodiment

[0043] Next, a description is given to a second embodiment of the present invention.

EXAMPLE 1

[0044] An etched foil is prepared in the same way as in the first embodiment except for using a waveform of the deformed sine wave having a zero current time during the period of time when the current falls as FIG. 4 shows. The AC currents of the foregoing deformed sine wave is applied to the pair of electrodes from the AC power supply unit.

[0045] In this example, the period of time when the current of the deformed sine wave falls is set as 30 against the period of time when the current of the deformed sine wave rises is made as 1. The current density is 0.50 A/cm², and the frequency is 40 Hz.

EXAMPLE 2

[0046] An etched foil is prepared in the same way as in the first embodiment except for using a waveform of the deformed sine wave having a different waveform current as FIG. 5 shows. The AC currents of the foregoing deformed sine wave is applied to the pair of electrodes from the AC power supply unit.

[0047] In this example, the period of time when the current of the deformed sine wave falls is set as 30 against the period of time when the current of the deformed sine wave rises is made as 1. The current density of the different waveform is 0.10 A/cm² with a duration of 0.02 seconds.

EXAMPLE 3

[0048] An etched foil is prepared in the same way as in the first embodiment except for using a waveform of the deformed sine wave having a pulse current with a peak current not exceeding the peak current of the deformed sine wave as FIG. 6 shows. The AC currents of the foregoing deformed sine wave is applied to the pair of electrodes from the AC power supply unit.

[0049] In this example, the period of time when the current of the deformed sine wave falls is set as 30 against the period of time when the current of the deformed sine wave rises is made as 1. The current density is 0.50 A/cm², and the frequency is 40 Hz. And the current density of the pulse current is 0.30 A/cm² with a duration of 0.0001 seconds.

EXAMPLE 4

[0050] An etched foil is prepared in the same way as in the first embodiment except for using a waveform of the deformed sine wave having a duration when the current is zero as FIG. 7 shows. The AC currents of the foregoing deformed sine wave is applied to the pair of electrodes from the AC power supply unit.

[0051] In this example, the period of time when the current of the deformed sine wave falls is set as 30 against the period of time when the current of the deformed sine wave rises is made as 1. The current density is 0.50 A/cm², the frequency is 40 Hz and the a duration of zero current is 0.02 seconds.

EXAMPLE 5

[0052] An etched foil is prepared in the same way as in the first embodiment except for using a waveform of the deformed sine wave having a duration when the current is zero and, the duration is shorter than one period of frequency of the deformed sine wave as FIG. 8 shows. The AC currents of the foregoing deformed sine wave is applied to the pair of electrodes from the AC power supply unit.

[0053] In this example, the period of time when the current of the deformed sine wave falls is set as 30 against the period of time when the current of the deformed sine wave rises is made as 1. The current density is 0.50 A/cm², the frequency is 40 Hz and the a duration of zero current is 0.01 seconds.

COMPARATIVE EXAMPLE 2

[0054] Etched foil is prepared to serve as a comparative example 2 in the same way as the comparative example 1.

[0055] Evaluation results of characteristics of the etched foil prepared in Examples 1 to 5 and in the comparative example 2 are shown in Table 2. The evaluation of the foregoing etched foil is conducted in the same way as in the first embodiment. TABLE 2 EIAJ (RC-2364A) test results relative film withstand automatic bending capacitance voltage (Vt) test (times) second embodiment Example 1 115 23.6 124 Example 2 112 23.4 120 Example 3 111 23.2 122 Example 4 113 23.4 123 Example 5 114 23.8 120 Comparative 100 22.7 112 Example 2

[0056] As is clearly seen in Table 2, by etching an aluminum foil using the deformed sine AC currents having the following waveform, etch pits grow in high density and a dissolving of aluminum foil surface can be suppressed. The deformed sine AC currents includes such wave shape as the current fall to zero during the current falling period, adding a different waveform to the deformed sine waveform and providing a period of zero current time to the waveform of the deformed sine wave. Therefore, the surface area of aluminum foil expands more efficiently in comparison with the comparative example 2, thereby bringing about the advantage of enhancing he electric capacity of etched foil.

[0057] In addition, by providing an “off” period of current after a cathode current application, aluminum particles attached onto the surface of aluminum foil are dispersed, thereby facilitating the growth and expansion in diameter of etch pits with an application of an anode current carried out thereafter. As a result, the amount of electricity consumed in the next step of anodizing can be reduced.

[0058] The Third Embodiment

[0059] Next, a description is given to the third embodiment of the present invention.

EXAMPLE 6

[0060] First, in a manufacturing method of electrode foil for aluminum electrolytic capacitors in the present example, a 100 μm thick and 99.98% purity aluminum foil is immersed in a 90° C. aqueous solution containing 1.0 wt % of phosphoric acid for 60 seconds as pretreatment.

[0061] Then, as a first etching process, the foregoing aluminum foil is immersed in an etching vessel filled with a 35° C. electrolytic solution containing 5 wt % of hydrochloric acid, 4 wt % of aluminum chloride, 0.1 wt % of sulfuric acid, 0.5 wt % of phosphoric acid and 0.2 wt % of nitric acid (with the aluminum ion concentration in the electrolytic solution adjusted to 1.10 wt %) and an etching process is performed by applying AC currents of a deformed sine wave to a pair of electrodes from an AC power supply unit for 150 seconds as FIG. 1 shows.

[0062] The current density is 0.50 A/cm² and the frequency is 45 Hz and, with the period of time when the current rises in the foregoing deformed sine wave taken as 1, the period of time when the current falls is set to 80 as FIG. 2 shows.

[0063] Then, as an intermediate treatment, the aluminum foil after the first etching process is immersed in a 85° C. aqueous solution containing 5 wt % of potassium phosphate, 0.05 wt % of sodium phosphate and 0.02 wt % of aluminum ion concentration for 3 minutes.

[0064] Subsequently, as a second etching process, the foregoing aluminum foil is immersed in an etching vessel filled with a 25° C. electrolytic solution containing 5 wt % of hydrochloric acid, 2 wt % of aluminum chloride, 0.1 wt % of sulfuric acid, 0.5 wt % of phosphoric acid and 0.2 wt % of nitric acid (with the aluminum ion concentration in the electrolytic solution adjusted to 0.10 wt %) and an etching process is performed by applying AC currents of a deformed sine wave to a pair of electrodes from an AC power supply unit for 150 seconds.

[0065] The current density is adjusted to 0.35 A/cm² and the frequency is set to 25 Hz and, with the period of time when the current rises in the foregoing deformed sine wave taken as 1, the period of time when the current falls is set to 40 as FIG. 2 shows.

[0066] Finally, the aluminum foil is immersed in a 60° C. aqueous solution containing 10 wt % of sulfuric acid for 100 seconds and then heat treated at 250° C. for 120 seconds, and the production of etched foil that serves as electrode foil for aluminum electrolytic capacitors is finished.

[0067] The AC power supply unit used in the first etching process and second etching process is the same one as used in the first embodiment. Although the aluminum foil undergoes the respective processes and treatments according to a batch system in the above descriptions, a continuous processing system can also be employed from the pretreatment to the final heat treatment with conveyor rollers installed above the respective treatment vessels.

EXAMPLE 7

[0068] Etched foil is prepared in the same way as in the example 6 except for a pretreatment of the aluminum foil in a 60° C. aqueous solution containing 2 wt % of sodium metasilicate for 60 seconds and then in a aqueous solution containing 5 wt % of hydrochloric acid for 90 seconds.

EXAMPLE 8

[0069] Etched foil is prepared in the same way as in the example 6 except for using ammonium phosphate in place of the potassium phosphate of the intermediate treatment and conducting the intermediate treatment at the aqueous solution temperatures of 40, 50, 60, 70, 80, 90 and 100° C., respectively.

EXAMPLE 9

[0070] Etched foil is prepared in the same way as in the example 6 except for conducting the intermediate treatment in a 85° C. aqueous solution containing 14 wt % of 2-ammonium adipate with an current density of 0.01 A/cm² and keeping the applied voltage at 0.2 V for 30 seconds after it reached to 0.2 V.

COMPARATIVE EXAMPLE 3

[0071] Etched foil is prepared in the same way as in the example 6 except for performing a first etching process and a second etching process by using the AC currents having a sine wave (the ratio between the period of time when the electric current rises from zero to a peak value and the period of time when the electric current falls from the peak value to zero is 1:1) as FIG. 10 shows and washing the aluminum foil in water as an intermediate treatment.

[0072] Evaluation results of characteristics of the etched foil prepared in the examples 6 to 9 and in the comparative example 3 are shown in Table 3. The evaluation of the etched foil is conducted in the same way as in the first embodiment. TABLE 3 EIAJ (RC-2364A) test results film withstand automatic relative voltage bending test capacitance (Vt) (times) second Example 6 109 23.1 124 embodi- Example 7 111 23.2 125 ment Example 8 40 103 22.9 122 50 108 23.3 124 60 110 23.2 126 70 112 23.4 123 80 114 23.3 125 90 107 23.0 124 100 102 23.2 123 Example 9 111 23.3 125 Comparative Example 3 100 22.7 115

[0073] As is clearly seen in Table 3, the etched foils prepared in the present embodiment show higher values in electric capacity than the etched foil of the comparative example 3.

[0074] This is attributed to the fact that both the further growth of etch pits formed in the first etching process and the further production of etch pits are carried out at the same time efficiently in the second etching process, by making the current rise time of the deformed sine wave in the second etching process longer than the current rise time in the first etching process.

[0075] When a comparison is made between a case where aluminum foil is immersed only in an acidic aqueous solution before etching processing and a case where aluminum foil is immersed in an alkaline aqueous solution and in an acidic aqueous solution before etching processing, a higher electric capacity is obtained in the latter.

[0076] Although a specific value in electric current density is used in the present embodiment, the etch pit densities become higher by making the electric current density of the first etching process higher than the electric current density of the second etching process within a range of 0.012 to 2.55 A/cm². Thus, the electric capacity of resulting etched foil becomes higher.

[0077] Further, when the frequency of AC currents for the first etching process is higher than the frequency of the second etching process within a range of 5 to 45 Hz, the etch pits are made higher in density, thereby allowing the electric capacity of resulting etched foil to be enhanced.

[0078] However, when the electric current density of AC currents exceeds 2.25 A/cm², the surface of aluminum foil are etched excessively, thereby not allowing the surface area of aluminum foil to be expanded. On the other hand, when the current density is less than 0.012 A/cm², the etch pits do not distribute uniformly in location.

[0079] With respect to the frequency of AC currents, when the frequency exceeds 45 Hz, the surface of aluminum foil is etched excessively, thereby not leading to expansion of the surface area of aluminum foil. On the other hand, when the frequency is less than 5 Hz, the etch pits do not distribute uniformly in location.

[0080] With respect to the aluminum concentration in an electrolytic solution, when the aluminum ion concentration in the electrolytic solution for the first etching process is increased, the chemical dissolving on the surface of aluminum foil can be suppressed, thereby allowing the electric capacity to be enhanced. The optimum aluminum ion concentration ranges from 0.07 to 1.40 wt %.

[0081] By making aluminum ion existent in an electrolytic solution, resistance of the electrolytic solution is increased at the time of etching, thereby allowing the aluminum to be prevented from dissolving abruptly and excessively due to anode currents produced instantaneously. Also, by controlling the temperatures of electrolytic solution, the electric conductivity of electrolytic solution can be controlled so as to prevent a useless dissolving reaction of aluminum from taking place, thereby preventing a deviation in diameter of etch pits caused by an etching process.

[0082] With respect to the temperatures of electrolytic solution, the etch pit density can be increased by lowering the temperatures of electrolytic solution used in the second etching process without destroying the etch pits produced in the first etching process. The optimum temperature range is from 10 to 50° C.

[0083] A higher electric capacity than that of etched foil prepared in the comparative example 3 is obtained by conducting an intermediate treatment between the steps of performing etching with an aqueous solution containing phosphoric acid derivatives at a temperatures of the aqueous solution kept in the range of 50 to 90° C. When the temperatures of the intermediate treatment is 40° C., a protective film is not formed sufficiently and, when the temperature is 100° C., the surface of each respective etch pit dissolves. The electric capacity can be increased somewhat when compared with the etched foil of the comparative example 3 but no remarkable advantages can be obtained.

[0084] More specifically, the intermediate treatment allows a protective film to cover the surface of each respective etch pit formed in the first etching process. This prevents the etch pits formed in the first etching processing from a destruction caused by the second etching process and the surface area expand effectively.

[0085] In addition, by making aluminum ions dissolved into a aqueous solution containing phosphoric acid derivatives, forming of a protective film on the surface of each respective etch pit produced in the first etching process can be made easy. Particularly, when the intermediate treatment is repeated several times, it is preferred that the aluminum ion concentration is increased stepwise every time the intermediate treatment is repeated. The optimum aluminum ion concentration ranges from 0.0015 to 0.08 wt %.

[0086] When the temperatures of a aqueous solution containing phosphoric acid derivatives exceed 90° C., the surface of each respective etch pit dissolves, and the surface area of aluminum foil do not expand in the following etching process. On the other hand, when the temperatures are below 50° C., the protective film does not form in a short period.

[0087] Furthermore, when the aluminum ion concentration in a aqueous solution containing phosphoric acid derivatives exceeds 0.08 wt %, a thin protective film is formed and etch pits are eroded in the following etching process. Conversely, when the aluminum concentration is less than 0.0015 wt %, a protective film is not formed with resultant dissolving of etch pits.

[0088] Even when an intermediate treatment is conducted in an aqueous solution containing organic acid and an anodizing is performed within a voltage ranging from 0.05 to 1.8 V, the same advantages as in the foregoing exemplary embodiments are obtained.

[0089] Fourth Embodiment

[0090] Next, a description is given to fourth embodiment of the present invention.

[0091] A method of manufacturing electrode foil for electrolytic capacitors in the present embodiment starts with a step of immersing 99.98% purity and 100 μm thick aluminum foil in a 90° C. aqueous solution containing 1.0 wt % of phosphoric acid for 60 seconds.

[0092] Then, as a first etching process, the aluminum foil is immersed in an etching vessel filled with a 35° C. electrolytic solution containing 5 wt % of hydrochloric acid, 4 wt % of aluminum chloride, 0.1 wt % of sulfuric acid, 0.5 wt % of phosphoric acid and 0.2 wt % of nitric acid (with the aluminum ion concentration in the electrolytic solution adjusted to 0.17 wt %) and AC current of a deformed sine wave is applied to a pair of electrodes from an AC power supply unit for 100 seconds as FIG. 1 shows.

[0093] The current density of AC currents from the AC power supply unit is 0.50 A/cm² and the frequency is 40 Hz. The period of time when the current rises in the deformed sine wave is taken as 1, the period of time when the current falls is set to 80 as FIG. 2 shows.

[0094] Then, as an intermediate treatment, the aluminum foil after the first etching process is immersed in a aqueous solution containing 5 wt % of potassium phosphate, 0.05 wt % of sodium phosphate and 0.02 wt % of aluminum ion concentration for 3 minutes with the temperature of the aqueous solution kept at 85° C.

[0095] Subsequently, as a second etching process, the aluminum foil is immersed in an etching vessel filled with a 30° C. electrolytic solution containing 5 wt % of hydrochloric acid, 2 wt % of aluminum chloride, 0.1 wt % of sulfuric acid, 0.5 wt % of phosphoric acid and 0.2 wt % of nitric acid (with the aluminum ion concentration in the electrolytic solution adjusted to 0.10 wt %) and AC currents of a deformed sine wave is applied to a pair of electrodes from an AC power supply unit for 100 seconds.

[0096] The current density is 0.35 Alcm² and the frequency is 30 Hz, with the period of time when the current rises in the foregoing deformed sine wave is taken as 1, the period of time when the current falls is set to 40 as FIG. 2 shows.

[0097] Next, as another intermediate treatment, the aluminum foil is immersed in a 85° C. aqueous solution containing 5 wt % of potassium phosphate, 0.05 wt % of sodium phosphate and 0.02 wt % of aluminum ion.

[0098] Thereafter, as a third etching process, the aluminum foil is immersed in an etching vessel filled with a 20° C. electrolytic solution containing 5 wt % of hydrochloric acid, 1 wt % of aluminum chloride, 0.1 wt % of sulfuric acid, 0.5 wt % of phosphoric acid and 0.2 wt % of nitric acid (with the aluminum ion concentration in the electrolytic solution adjusted to 0.07 wt %) and AC current of a deformed sine wave is applied to a pair of electrodes from an AC power supply unit for 100 seconds.

[0099] The current density is 0.25 A/cm² and the frequency is 20 Hz, with the period of time when the current rises in the foregoing deformed sine wave is taken as 1, 30 the period of time when the current falls is set to 40, 30, 20, 10, 1.0, 0.5 and 0.1, respectively.

[0100] Finally, the aluminum foil undergoes an immersion treatment in a 60° C. aqueous solution containing 10 wt % of sulfuric acid for 100 seconds and then a heat treatment at 250° C. for 120 seconds, thereby finishing the production of etched foil that serves as electrode foil for aluminum electrolytic capacitors.

[0101] The AC power supply unit used in the first etching process, the second etching process and the third etching process, respectively, is the same one as used in the first embodiment. Although the aluminum foil undergoes the respective processes and treatments according to a batch system in the above descriptions, a continuous processing system can also be employed from the pretreatment to the final heat treatment with conveyor rollers installed above the respective treatment vessels.

COMPARATIVE EXAMPLE 4

[0102] Etched foil is prepared in the same way as in the fourth embodiment except for performing the first etching process, the second etching process and the third etching process by using the waveform of AC currents having a sine wave as FIG. 10 shows and washing the aluminum foil in water as the intermediate treatment.

[0103] Evaluation results of characteristics of the etched foil prepared in the fourth embodiment and in the comparative example 4 are shown in Table 4. The evaluation of the etched foil is conducted in the same way as in the first embodiment. TABLE 4 Time ratio of EIAJ (RC-2364A) test results deformed sign relative film withstand automatic wave capaci- voltage bending test rise fall tance (Vt) (times) fourth 1.0 40 115 23.6 114 embodiment 1.0 30 113 23.4 115 1.0 20 111 23.5 115 1.0 1 109 23.3 114 1.0 1.0 106 23.4 113 1.0 0.5 105 23.2 114 1.0 0.1 103 23.1 112 Comparative 1.0 1.0 100 22.0 110 Example 4

[0104] As is clearly seen in Table 4, the etched foil prepared by making the period of time when the deformed sine wave falls in the third etching process shorter than the period of time when the deformed sine wave falls in the first and second etching processes, a higher value in electric capacity is obtained.

[0105] This is attributed to the fact that the growth of etch pits formed in the first and second etching processes is promoted, and at the same time more etch pits are produced efficiently by reducing the gradient of the rising portion the deformed sine wave for the third etching process.

[0106] When the step of performing an etching process is repeated at least twice or more, the surface area of aluminum foil can be further expanded by reducing the current density and the frequency of AC currents as the number of repeating times of performing the etching process increases. As a result, etch pits can be formed in high density. The ranges for current density and frequency most suitable for etching are 0.012 to 2.55 A/cm² and 5 to 45 Hz, respectively.

[0107] Also, by lowering the temperatures of a aqueous solution used in an etching process as the number of repeating times of performing the etching process increases, the density of etch pits can be increased without destroying etch pits. The optimum temperature range is 10 to 50° C.

[0108] Fifth Embodiment

[0109] Next, a description is given to an fifth embodiment of the present invention.

[0110] A method of manufacturing electrode foil for electrolytic capacitors in the present embodiment starts with a pretreatment step of immersing 100 μm thick and 99.98% purity aluminum foil in a 90° C. aqueous solution containing 1.0 wt % of phosphoric acid for 60 seconds.

[0111] Then, the aluminum foil is immersed in an etching vessel filled with a 30° C. electrolytic solution containing 5 wt % of hydrochloric acid, 2 wt % of aluminum chloride, 0.1 wt % of sulfuric acid, 0.5 wt % of phosphoric acid and 0.2 wt % of nitric acid (with the aluminum ion concentration in the electrolytic solution adjusted to 0.1 wt %) and AC currents of a deformed sine wave are applied to a pair of electrodes for 300 seconds as FIG. 1 shows.

[0112] The current density is 0.50 A/cm² and the frequency is 40 Hz, with the period of time when the current rises in the deformed sine wave is taken as 1, the period of time when the current falls is set to 100 as FIG. 2 shows.

[0113] Then, the aluminum foil undergoes an immersion treatment in a 60° C. aqueous solution containing 10 wt % of sulfuric acid for 100 seconds and subsequently a hydrating treatment in a 50° C. aqueous solution containing 0.1 wt % of ethanolamine. Thereafter, the aluminum foil undergoes a heat treatment at 250° C. for 3 minutes in such an atmosphere as nitrogen (with an oxygen concentration of 1.0%), argon (with an oxygen concentration of 2.0%), hydrogen (with an oxygen concentration of 1.0%) or air, thereby preparing etched foils in different heat treatment conditions.

[0114] Evaluation results of characteristics of the etched foil prepared as described above are shown in Table 5. The evaluation of the etched foil is conducted in the same way as in the first embodiment. TABLE 5 EIAJ (RC-2364A) test results relative film withstand automatic bending fifth embodiment capacitance voltage (Vt) test (times) nitrogen atmosphere 115 23.6 124 argon atmosphere 114 23.5 125 hydrogen 115 23.5 124 atmosphere air atmosphere 100 22.6 114

[0115] As is clearly seen in Table 5, the hydrate film formed in the hydrating treatment and heat treated in inert gas atmospheres makes anodized film with more uniform and closely packed structure in the following step. As a result, a remarkable enhancement of electric capacity and leakage current characteristics for anode foil can be obtained.

[0116] By conducting the heat treatment in a nitrogen gas atmosphere, an argon gas atmosphere or a hydrogen gas atmosphere rather than in the air, a remarkable enhancement of electric capacity and leakage current characteristics for anode foil can be obtained.

[0117] This result is assumed that, when a heat treatment is performed in an oxygen rich atmosphere, an extra amount of oxide film is formed by the oxygen in the atmosphere at the time when a hydrate film is transformed to an oxide film, thereby making it rather hard for an anodized film to create a closely packed structure in the anodizing process. By preventing the forming of an extra amount of oxide film by a reduction of oxygen in the atmosphere used in the heat treatment as in the present embodiment, an anodized film with a closely packed structure can be produced, thereby enhancing the electric capacity and leakage current characteristics of anode foil.

[0118] Sixth Embodiment

[0119] Next, a description is given to an embodiment sixth of the present invention.

EXAMPLE 10

[0120] A method of manufacturing electrode foil for electrolytic capacitors in the present example starts with a pretreatment step of immersing 100 μm thick and 99.98% purity aluminum foil in a 90° C. aqueous solution containing 1.0 wt % of phosphoric acid for 60 seconds.

[0121] Then, in the same way as in the first embodiment, the aluminum foil is immersed in an etching vessel filled with a 30° C. electrolytic solution containing 5 wt % of hydrochloric acid, 2 wt % of aluminum chloride, 0.1 wt % of sulfuric acid, 0.5 wt % of phosphoric acid and 0.2 wt % of nitric acid (with the aluminum ion concentration in the electrolytic solution adjusted to 0.1 wt %) and AC currents of a deformed sine wave are applied to a pair of electrodes for 300 seconds from an AC power supply unit to perform an etching process.

[0122] The current density is 0.50 A/cm² and the frequency is 40 Hz, with the period of time when the current rises in the deformed sine wave is taken as 1, the period of time when the current falls is set to 100 as FIG. 2 shows.

[0123] Also, at the time when the etching process is performed, the voltage across the pair of electrodes is measured using of a voltmeter and the measurement results are fed back to the AC power supply unit, thereby controlling the AC currents applied to the pair of electrodes to be constant.

[0124]FIG. 9 is a block diagram showing a structured to feedback the voltage between the pair of electrodes to the AC power supply unit. In FIG. 9, a voltage between the pair of electrodes measured by voltmeter 23 is sent to voltage signal receiver 24 and is converted in voltage signal converter 25. The converted signal is further sent to voltage signal generator 26 to be changed as a common signal, which is transmitted to AC power supply unit 22 via feedback signal transmitter 27.

[0125] Finally, the aluminum foil undergoes an immersion treatment in a 60° C. aqueous solution containing 10 wt % of sulfuric acid for 100 seconds and then a heat treatment at 250° C. for 120 seconds, thereby finishing the production of etched foil that serves as electrode foil for aluminum electrolytic capacitors.

EXAMPLE 11

[0126] In the example 10, instead of measuring a voltage between the electrodes, a measurement of conductivity of the electrolytic solution in the etching vessel is conducted using a conductivity detector, and the measurement results are fed back to the AC power supply unit, thereby controlling the AC currents applied to the electrodes to be constant. (See FIG. 9.)

EXAMPLE 12

[0127] In the example 10, instead of measuring a voltage between the electrodes, a measurement of concentrations of aluminum of the electrolytic solution in the etching vessel is conducted using a concentration detector and the measurement results are fed back to the AC power supply unit, thereby controlling the AC currents applied to the electrodes to be constant. (See FIG. 9.) Comparative example 5 Etched foil for electrode foil for aluminum electrolytic capacitors is produced in the same way as in the example 10 except for eliminating the controlling of the AC power supply unit.

[0128] Evaluation results of characteristics of the etched foil prepared in the examamples 10 to 12 and in the comparative example 5 are shown in Table 6. The evaluation of the etched foil is conducted in the same way as in the first embodiment. TABLE 6 EIAJ (RC-2364A) test results relative film withstand automatic bending capacitance voltage (Vt) test (times) sixth embodiment Example 10 115 23.6 124 Example 11 114 23.5 125 Example 12 115 23.5 124 Comparative 100 22.1 111 Example 5

[0129] As is clearly seen in Table 6, by controlling the currents of the AC power supply unit to be constant, the respective etching treatments are conducted under optimum conditions, thereby enhancing the electric capacity per unit amount of dissolved aluminum foil efficiently. As a result, the electric capacity of etched foil increases efficiently.

[0130] Although a description is given in above explanation about the case where the currents of the AC power supply unit are controlled, even by controlling frequencies or waveforms of the output of the AC power supply unit, an advantage of enhancing the electric capacity of etched foil can be obtained.

[0131] When the etching treatments are performed continuously by the use of a plurality of etching vessels, the electric currents of the AC power supply unit can be controlled by means of a voltmeter connected the electrodes of each respective etching vessel or by means of a conductivity detector or an aluminum concentration detector installed in the electrolytic solution of the etching vessel.

[0132] As described above, according to the present invention, uniform and closely packed etch pits are produced during the period of time when a current rises form zero to a peak value in an etching process of aluminum foil. And during the next period of time when a current falls from the peak value to zero, the etch pits grow to a higher density. As a result, the surface area of aluminum foil is expanded efficiently, thereby leading to an advantage of enhancing the electric capacity of electrode foil for aluminum electrolytic capacitors.

[0133] In consideration of a chemical dissolving reaction, an electrochemical reaction and a diffusion phenomenon, the present invention makes it possible to expand the surface area of aluminum foil efficiently by controlling the current density and frequencies of AC current at the time of the etching process, and also by controlling the temperature and aluminum concentration in the electrolytic solution.

[0134] Although, the description given to the above exemplary embodiments deals with the cases where the main ingredient of the electrolytic solution is hydrochloric acid and other additive electrolytes such as aluminum chloride, sulfuric acid, phosphoric acid and nitric acid are added, other commercially available electrolytes such as oxalic acid and the like well-known electrolytes may be added. 

What is claimed is:
 1. A method of manufacturing electrode foil for aluminum electrolytic capacitors by etching an aluminum foil by applying an alternating current to electrodes in an electrolytic solution, said alternating current having a waveform of a deformed sine wave, wherein a period of time when an electric current rises from zero to a peak current value, differs from a period of time when said electric current falls from said peak current value to zero.
 2. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 1, wherein said electrolytic solution is an aqueous solution mainly containing hydrochloric acid and also containing at least one selected from a group consisting of sulfuric acid, oxalic acid, nitric acid and phosphoric acid.
 3. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 1, wherein said period of time when an electric current falls is longer than said period of time when said electric current rises.
 4. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 3, wherein, with said period of time when an electric current rises being as 1, said length of time when said electric current falls ranging from 1.05 to
 120. 5. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 1, wherein at a portion of said deformed sine wave, where said electric current falls from said peak current value, said electric current is made zero.
 6. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 1, wherein on a waveform of said alternating current an electric current of a different waveform is superimposed.
 7. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 1, wherein a duration of zero electric current is provided on said waveform of alternating current.
 8. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 1, wherein on said waveform of alternating current is provided with a duration of zero electric current shorter than one period of frequency of said alternating current.
 9. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 1, wherein said etching is repeated at least twice and at least one intermediate treatment to form a protective film is performed between said etching treatments.
 10. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 1, wherein said aluminum foil is treated with an alkaline aqueous solution and an acidic aqueous solution before said etching.
 11. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 1, wherein said aluminum foil is subjected to a hydration treatment and heat treatment in one of an inert gas atmosphere and a reducing gas atmosphere after said etching.
 12. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 11, wherein said inert gas and reducing gas is one selected from a group consisting of argon, nitrogen and hydrogen.
 13. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 9, wherein a frequency of alternating current for said etching is reduced as a number of said etching increases, said frequency ranging from 5 to 45 Hz.
 14. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 9, wherein a current density for said etching ranges from 0.012 to 2.55 A/cm².
 15. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 9, wherein an aluminum ion concentration in said electrolytic solution ranges from 0.07 to 1.4 wt %.
 16. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 9, wherein a temperature of electrolytic solution ranges from 10 to 50° C.
 17. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 9, wherein said intermediate treatment is performed in a aqueous solution containing a phosphoric acid derivative.
 18. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 17, wherein a temperature of said aqueous solution ranges from 50 to 90° C.
 19. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 17, wherein an aluminum ion concentration of said aqueous solution ranges from 0.0015 to 0.08 wt %.
 20. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 9, wherein said intermediate treatment is an anodizing performed in an organic acid aqueous solution.
 21. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 20, wherein an anodizing voltage of said anodizing ranges from 0.05 to 1.8 V.
 22. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 1, wherein a voltage applied to electrodes is fed back to an AC power supply unit to control said alternating current.
 23. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 1, wherein an electric conductivity of said electrolytic solution is fed back to an AC power supply unit to control said alternating current.
 24. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 1, wherein an aluminum concentration of said electrolytic solution is fed back to an AC power supply unit to control said alternating current.
 25. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 22, wherein a controlling of said alternating current is carried out by changing at least one of output current, frequency and waveform of said alternating current.
 26. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 23, wherein a controlling of said alternating current is carried out by changing at least one of output current, frequency and waveform of said alternating current.
 27. The method of manufacturing electrode foil for aluminum electrolytic capacitors according to claim 24, wherein a controlling of said alternating current is carried out by changing at least one of output current, frequency and waveform of said alternating current.
 28. An AC power supply unit used in manufacturing electrode foil for aluminum electrolytic capacitors comprising a power supply that produces an alternating current having a waveform of deformed sine wave, wherein a period of time when an electric current rises from zero to a peak value differs from a period of time when said electric current falls from said peak value to zero.
 29. The AC power supply unit according to claim 28, wherein said waveform of deformed sine wave has a zero electric current during said period of time when said electric current falls.
 30. The AC power supply unit according to claim 28, wherein said power supply produces an alternating current having a waveform, wherein a different waveform is superimposed to said deformed sine wave.
 31. The AC power supply unit according to claim 28, wherein said power supply produces an alternating current having a waveform including a duration when an electric current is zero.
 32. The AC power supply unit according to claim 28, wherein said power supply produces an alternating current having a waveform including a duration when an electric current remains at zero for a period of time shorter than one period of frequency of said alternating current. 